▎ 摘　　要

NOVELTY - The sensor has a dual-layer polyimide film substrate provided with an upper layer polyimide film and a lower layer polyimide film. An end of the lower layer polyimide film is formed with a square cavity structure. The upper layer polyimide film is provided with a fixing part and formed with a biomimetic cilia structure. A root part of the biomimetic cilia structure is connected with the fixing part. The fixing part is tightly bonded together with the lower layer polyimide film. A graphene-polyimide piezo-resistance unit is arranged in the biomimetic cilia structure. A signal lead is arranged on a surface of the fixing part and connected with the graphene-polyimide piezo-resistance unit. USE - Flow rate sensor. ADVANTAGE - The sensor is easy to produce in a batch and convenient to use, and has simple and flexible structure and high measuring precision. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a flow rate sensor manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a top perspective view of a flow rate sensor.