• 专利标题:   Method for manufacturing electronic device, involves forming graphene precursor on first portion of common substrate, forming graphene layer on graphene precursor, and forming semiconductor device on second portion of common substrate.
  • 专利号:   US2018040700-A1, US10236347-B2
  • 发明人:   HUSSAIN A M
  • 专利权人:   UNIV KING ABDULLAH SCI TECHNOLOGY, UNIV KING ABDULLAH SCI TECHNOLOGY
  • 国际专利分类:   H01L021/02, H01L021/8258, H01L023/66, H01L027/088, H01L029/08, H01L029/16, H01L029/66, H01L029/786, H01L021/00, H01L027/00, H01L029/00, H01Q001/36, H01Q001/38, H01L029/778, H01L027/092
  • 专利详细信息:   US2018040700-A1 08 Feb 2018 H01L-029/16 201814 Pages: 11 English
  • 申请详细信息:   US2018040700-A1 US664578 31 Jul 2017
  • 优先权号:   US372188P, US664578

▎ 摘  要

NOVELTY - The method involves forming a graphene precursor on a first portion of a common semiconductor substrate. A graphene layer is formed on the graphene precursor. A semiconductor device (412) is formed on a second portion of the common semiconductor substrate, where forming the graphene precursor comprises exposing the first portion of the common semiconductor substrate to a flux of acetylene or carbon beam. A masking layer is formed on the common semiconductor substrate. The masking layer is patterned to form an opening in the first portion of the common semiconductor substrate. USE - Method for manufacturing an electronic device (claimed). Uses include but are not limited to a mobile device such as mobile phone, tablet computer, laptop personal computer, and desktop personal computer, media playback device, and a TV. ADVANTAGE - The method enables utilizing a graphene-based matching circuit that exhibits a better frequency response, which is particularly advantageous at high frequencies despite high-power consumption of graphene-based transistors. The method enables allowing graphene to be obtained by low-cost process for selective graphitization of portions of semiconductor substrates, thus providing high yield with high predictability than graphitization by mechanical exfoliation of the graphene from graphite. DETAILED DESCRIPTION - The graphene layer is an antenna. An INDEPENDENT CLAIM is also included for an electronic device. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of an electronic device with a graphene device and a semiconductor device formed on a common semiconductor substrate. Electronic device (400c) Semiconductor device (412) Graphene device (414A)