▎ 摘　　要

NOVELTY - The method involves forming a vertical hole on a substrate (S101). A catalytic layer is utilized for forming a surface of the substrate (S102). A catalytic layer is utilized for covering an inner surface of the vertical hole (S103). A graphene layer is utilized for forming the catalyst layer (S104). The catalytic layer is utilized for providing a vertical hole filling effect (S105). USE - Multi-layer graphene vertical interconnection structure manufacturing method. ADVANTAGE - The method enables improving vertical hole filling effect and electric signal transmission performance of vertical interconnection structure. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a multi-layer graphene vertical interconnection structure manufacturing method.'(Drawing includes non-English language text)' Step for forming a vertical hole on a substrate (S101) Step for forming a surface of the substrate (S102) Step for covering an inner surface of the vertical hole (S103) Step for forming the catalyst layer (S104) Step for providing a vertical hole filling effect (S105)