• 专利标题:   Method for preparing graphene in electronic site transmission device, involves filling nickel plate with hydrothermal carbon polyhydric alcohols, and performing annealing process of silicon tip by using tubular furnace.
  • 专利号:   CN105197878-A
  • 发明人:   WU D, XU S, WANG L, XIONG D, ZHU Y
  • 专利权人:   UNIV EAST CHINA NORMAL
  • 国际专利分类:   B81C001/00
  • 专利详细信息:   CN105197878-A 30 Dec 2015 B81C-001/00 201604 Pages: 9 English
  • 申请详细信息:   CN105197878-A CN10350542 23 Jun 2015
  • 优先权号:   CN10350542

▎ 摘  要

NOVELTY - The method involves performing RCA cleaning process of a silicon chip. Nickel chemistry plating process of a graphite mold is performed. Soaking process is performed by surface active agent. Nickel plate is cleaned by hydrothermal carbon polyhydric alcohols. Annealing process of the silicon tip is performed in a tubular furnace. Photo-etching process of a semiconductor is performed. Thickness of an n-type silicon part is about 50 to 500 microns. USE - Method for preparing graphene in an electronic site transmission device. ADVANTAGE - The method enables reducing graphene preparing cost and defect rate in an environment-friendly manner. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a method for preparing graphene in an electronic site transmission device. '(Drawing includes non-English language text)'