▎ 摘　　要

NOVELTY - The structure has a slit waveguide modulator provided with an optical waveguide substrate layer (1), an optical waveguide coating layer (2) and a first slit waveguide (3) and a second slit waveguide (4). Two surfaces of the slit waveguides are respectively covered with a first graphene layer (7), a second graphene layer (8), a third graphene layer (9) and a fourth graphene layer (10). A mode conversion structure is provided with a conical waveguide structure (15), an asymmetric waveguide coupler structure (16), a waveguide arm (17), a waveguide arm (2) and a modulator overhead structure (19). USE - 3um middle infrared wave band based slit waveguide polarization independent graphene electro-optic modulator structure. ADVANTAGE - The structure is easy to integrate, and has stronger focusing effect, high modulation rate and low power consumption, and converts a TM mode into a TE mode through a mode conversion structure so as to realize polarization independent modulation of a light wave, and effectively solves problem of current graphene light modulator sensitive to incident light wave polarization direction. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of 3um middle infrared wave band based slit waveguide polarization independent graphene electro-optic modulator structure. Optical waveguide substrate layer (1) Optical waveguide coating layer (2) Waveguide arm (2) Slit waveguides (3,4) Graphene layers (7-10) Conical waveguide structure (15) Asymmetric waveguide coupler structure (16) Waveguide arm (17) Modulator overhead structure (19)