• 专利标题:   Method for manufacturing graphene nanometer belt device array, has electrode areas exposed at both ends of graphene nano-ribbon array to keep electrodes in electrode area such that fabrication of graphene nano-ribbon array is completed.
  • 专利号:   CN111129113-A
  • 发明人:   ZHANG M, WANG Y, LI P, XUE Z, DI Z
  • 专利权人:   SHANGHAI INST MICROSYSTEM INFORMATION
  • 国际专利分类:   H01L021/329, H01L029/06, H01L029/16, H01L029/86
  • 专利详细信息:   CN111129113-A 08 May 2020 H01L-029/06 202045 Pages: 12 Chinese
  • 申请详细信息:   CN111129113-A CN11346297 24 Dec 2019
  • 优先权号:   CN11346297

▎ 摘  要

NOVELTY - The method involves fixing a graphene film on a germanium substrate. A lattice array is fixed on the graphene film. A mask layer is formed on the lattice array. Lattice array peeling off process is performed. The graphene film is fixed with an outer side of a hole is etched. Lattice array etching process is performed. A graphene lattice is used as a nucleation site to grow a graphene nanometer belt device array. Electrode areas are exposed at both ends of the graphene nanometer belt device array to keep electrodes in an electrode area such that fabrication of the graphene nanometer belt device array is completed. USE - Method for manufacturing a graphene nanometer belt device array (Claimed). ADVANTAGE - The method enables improving application practicability and large-scale production efficiency of the graphene nanometer belt device array. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a method for manufacturing a graphene nanometer belt device array. (Drawing includes non-English language text).