▎ 摘 要
NOVELTY - A grading gallium nitride (GaN) nano array comprises graphene nano sheet substrate and upper substrate without catalyst graphene nano sheet damaged chemical vapor deposition (CVD) growth of grading GaN nano array. The graphene nano sheet rotary is coated on silicon or sapphire substrate. USE - Grading gallium nitride nano array used for preparing high efficiency, flexible, high-performance GaN-based device. ADVANTAGE - The nano array can transfer to flexible substrate and high heat guide substrate. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a preparation method of the grading GaN nano array which comprises using graphene nano sheet as substrate for preparation of graphene nano sheet coated on silicon or sapphire substrate; coating graphene nano sheet and substrate in horizontal tubular furnace; and using gas phase deposition CVD method without catalyst growth grading GaN nano array.