▎ 摘　　要

NOVELTY - Manufacture of graphene involves adsorbing a molecule (43) having six-membered ring structure (28) onto the surface of a substrate (S), and irradiating the surface using a beam (26) of molecules containing carbon atoms. USE - Manufacture of graphene for fabrication of electronic device (claimed) e.g. ultra high-speed switching device, high frequency device and semiconductor device. ADVANTAGE - Easy control of the energy beam during manufacture of graphene, allows for suppressed formation of amorphous from of graphite, diamond and diamond like carbon, thereby yielding high-quality graphene. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) graphene manufacturing apparatus, which consists of a gas supply unit which supplies a gas comprising the molecule towards the surface of the substrate, and a beam irradiation unit which irradiates the beam of the molecule to the surface of the substrate; and (2) fabrication of an electronic device, which involves forming graphene on the surface of the substrate. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view explaining the manufacture of the graphene. Beam (26) Six-membered ring structure (28) Molecule (43) Substrate (S)