▎ 摘　　要

NOVELTY - The plasma device (100) has protective film (PL) that is made of impurity-doped graphene. A cavity forming unit (170) has cavity (C) in which discharge gas is stored. A primary electrode (120) is provided at top of the cavity forming unit and secondary electrode (180) is provided at bottom of the cavity forming unit. The inner wall of the cavity is made of graphene. The protective film has layers that are made of titanium dioxide, silicon dioxide, silicon nitride, tantalum oxide or magnesium oxide. USE - Plasma device used for backlight or display panel. ADVANTAGE - The reliability of the plasma device is improved and power consumption of the plasma device is reduced. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for plasma device manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of the plasma device. Plasma device (100) Primary electrode (120) Cavity forming unit (170) Secondary electrode (180) Cavity (C) Protective film (PL)