• 专利标题:   Semiconductor structure for electronic integrated circuit, has dielectric material including conductive region that is in contact with conductive element of graphene containing semiconductor device.
  • 专利号:   US2012205626-A1, US8440999-B2
  • 发明人:   DIMITRAKOPOULOS C D, COHEN G M, GATES S M, GRILL A, MCARDLE T J, SUNG C
  • 专利权人:   INT BUSINESS MACHINES CORP
  • 国际专利分类:   H01L021/20, H01L029/78
  • 专利详细信息:   US2012205626-A1 16 Aug 2012 H01L-029/78 201255 Pages: 14 English
  • 申请详细信息:   US2012205626-A1 US027797 15 Feb 2011
  • 优先权号:   US027797

▎ 摘  要

NOVELTY - The structure has a graphene containing semiconductor device comprising a graphene layer (18) overlying and contacting with a conductive region. A dielectric material (14) covers the graphene containing semiconductor device and portions of another dielectric material, where the former dielectric material includes a conductive region (16) that is in contact with a conductive element of the graphene containing semiconductor device. An additional wiring region is provided within the former dielectric material. The graphene containing semiconductor device includes a field effect transistor. USE - Semiconductor structure for an integrated circuit of an electronic device. ADVANTAGE - The structure reduces dimension of an electronic device, and improves the performance of the electronic device. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for the following: (1) a method for forming a semiconductor structure (2) a semiconductor circuit comprising a gate dielectric layer. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a semiconductor structure. Interconnect level (12) Dielectric material (14) Conductive region (16) Graphene layer (18)