• 专利标题:   Method for laminated transferring for graphene transparent conducting thin film that is utilized for reducing polymethyl methacrylate residue photoresist, involves preparing single-layer graphene by chemical vapor deposition epitaxy.
  • 专利号:   CN102938373-A
  • 发明人:   ZHANG C, ZHANG J, HAO Y, CHAI Z, WANG D, YAN Y, NING J, HAN D
  • 专利权人:   UNIV XIDIAN
  • 国际专利分类:   H01L021/28
  • 专利详细信息:   CN102938373-A 20 Feb 2013 H01L-021/28 201358 Pages: 9 Chinese
  • 申请详细信息:   CN102938373-A CN10408190 22 Oct 2012
  • 优先权号:   CN10408190

▎ 摘  要

NOVELTY - A laminated transfer method involves preparing single-layer graphene by chemical vapor deposition epitaxy of a copper foil substrate, performing polymethyl methacrylate photoresist spinning of support-layer graphene, performing copper substrate wet etching, directly transferring onto secondary-layer graphene, and sequentially repeating to obtain a final-laminated graphene. USE - Method for laminated transferring for graphene transparent conducting thin film that is utilized for reducing polymethyl methacrylate residue photoresist. ADVANTAGE - The method enables laminated transferring for graphene transparent conducting thin film with high electrical conductivity and purity. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart illustrating a laminated transfer method. '(Drawing includes non-English language text)'