▎ 摘　　要

NOVELTY - Manufacture of graphene of pressure sensor comprises (a) manufacturing mask plate of each layer of a package substrate (2), (b) etching a silicon substrate by a deep silicon etcher, (c) depositing a layer of insulating layer on the silicon substrate surface, (d) transferring and patterning a top layer boron nitride on a graphene sensitive structure, (e) preparing a bonding convex point and a sealing ring through evaporation process, (f) making the bonding bump and the sealing ring and (g) finishing bonding of a sensor chip and the packaging substrate by copper-tin solid-liquid diffusion bonding. USE - Manufacture of graphene of pressure sensor. Uses include but are not limited to pressure sensor, optical device, gas detection, radiation, material science, micro-nano processing, energy, biomedical and drug delivery. ADVANTAGE - The graphene realizes high measuring range and protection to the graphene, solves the problem that the service life is short and the device is not stable. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a manufacturing graphene of the pressure sensor. 1Sensor structure 2Package substrate 3Sealing cavity