• 专利标题:   Method for providing uniform, large-area graphene by way of transfer-free, direct-growth process, involves performing annealing process serves to convert carbon-containing layer into carbon nanotube (CNT).
  • 专利号:   US2018212151-A1, US10290808-B2
  • 发明人:   CHEN M, PAN S C, HSIEH C
  • 专利权人:   TAIWAN SEMICONDUCTOR MFG CO LTD, UNIV TAIWAN NAT
  • 国际专利分类:   H01L021/02, H01L029/06, H01L029/16, H01L029/66, H01L051/00, H01L051/05
  • 专利详细信息:   US2018212151-A1 26 Jul 2018 H01L-051/00 201851 Pages: 23 English
  • 申请详细信息:   US2018212151-A1 US925195 19 Mar 2018
  • 优先权号:   US169557, US925195

▎ 摘  要

NOVELTY - The method (1100) involves providing (1102) a substrate including a nanorod extending there. The nanorod includes an insulating outer surface that traverses a circumference of the nanorod. A carbon-containing layer over the insulating outer surface is formed (1104) depositing a metal layer over the carbon-containing layer by a vapor phase deposition process. An annealing process is performed (1108) and serves to convert the carbon-containing layer into a carbon nanotube (CNT) after depositing the metal layer. The metal layer includes one of nickel, copper, platinum, Iron, carbon monoxide, gold, and a copper nickel alloy. USE - Method for providing uniform, large-area graphene by way of transfer-free, direct-growth process. ADVANTAGE - The formation of high-quality, large-area graphene over any type of surface topography and/or surface structure, avoiding the challenges associated with conventional graphene transfer techniques, while also providing for the fabrication of CNT/graphene structures and devices having desirably tuned properties. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a device for providing uniform, large-area graphene by way of transfer-free, direct-growth process. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart illustrating a method of fabricating a graphene device. Method for providing uniform, large-area graphene (1100) Step for providing a substrate (1102) Step for forming a carbon-containing layer (1104) Step for forming metal layer (1106) Step for performing annealing process (1108)