• 专利标题:   Method of making magnetic field sensor using solid source graphene and graphene induced anti-ferromagnetic coupling and spin filtering, involves capping second ferromagnetic film with platinum layer.
  • 专利号:   WO2017142751-A1, US2017242083-A1, US10261139-B2
  • 发明人:   VANT ERVE O M J, COBAS E, CHENG S, JONKER B T
  • 专利权人:   US SEC OF NAVY, US SEC OF NAVY
  • 国际专利分类:   G01R033/06, H01L043/02, H01L043/10, H01L043/12, G01R033/00, G01R033/09, G11B005/127, H01R031/00
  • 专利详细信息:   WO2017142751-A1 24 Aug 2017 H01L-043/12 201759 Pages: 16 English
  • 申请详细信息:   WO2017142751-A1 WOUS016889 08 Feb 2017
  • 优先权号:   US297550P, US425731

▎ 摘  要

NOVELTY - The method involves sputtering and growing a first ferromagnetic metal surface on the amorphous carbon. The substrate and amorphous carbon and first ferromagnetic metal surface are annealed. A graphene film is formed on the first ferromagnetic metal surface, in which the first ferromagnetic metal surface comprises iron-nickel (NiFe). A second ferromagnetic film is sputtered and grown on the graphene film. The second ferromagnetic film is capped with a platinum layer. USE - Method of making magnetic field sensor using solid source graphene and graphene induced anti-ferromagnetic coupling and spin filtering. ADVANTAGE - The very high magnetoresistance values are achieved because of the spin filtering nature of multi-layer graphene. The absence of hysteretic behavior is achieved by the improved method. The low resistance of the multilayer for high signal to ratio is achieved by the improved method. The very high sensitivity, large magnetoresistance response in a small magnetic field range is achieved by the improved method. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a magnetic field sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the sputter process.