• 专利标题:   Graphene wiring structure has multi-layer graphene portion whose outer surface is physically connected with side surface of orthogonal direction with respect to substrate of insulating film.
  • 专利号:   JP6077076-B1, JP2017055061-A, US2017079138-A1, US9924593-B2
  • 发明人:   SAKAI T, YAMAZAKI Y, MIYAZAKI H, KATAGIRI M, KAJITA A, ISHIKURA T
  • 专利权人:   TOSHIBA KK, TOSHIBA KK
  • 国际专利分类:   C01B032/15, C01B032/18, C01B032/182, H01L021/3205, H01L021/768, H01L023/522, H01L023/532, H05K001/03, H05K001/09, H05K001/11, H05K003/14, H05K003/40, G11C011/00
  • 专利详细信息:   JP6077076-B1 08 Feb 2017 H01L-021/3205 201713 Pages: 22 Japanese
  • 申请详细信息:   JP6077076-B1 JP179856 11 Sep 2015
  • 优先权号:   JP179856

▎ 摘  要

NOVELTY - The structure (100) has a multi-layer graphene portion (3) whose one edge is connected with the metallic portion (2). The side surface of orthogonal direction with respect to the substrate (1) of first insulating film (4) and the side surface of orthogonal direction with respect to substrate of second insulating film (5) are provided opposite. Second outer surface of multi-layer graphene portion is physically connected with second side surface of the orthogonal direction with respect to substrate of second insulating film. USE - Graphene wiring structure. ADVANTAGE - The preparation process of the graphene wiring structure of fine width is provided. DETAILED DESCRIPTION - The structure has a metallic portion with which the ridgeline is connected. The predetermined expression is satisfied by setting perpendicularly wiring length which is the length of multilayer graphene portion of a parallel direction with respect to the surface of substrate. The substance between first layers is chosen from metal chloride, metal fluoride, alkali metal, alkaline-earth metal, halogen, and inter-halogen. The substance between second layers is chosen from oxide, nitride, and carbide. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of the graphene wiring structure. Substrate (1) Metallic portion (2) Multi-layer graphene portion (3) Insulating films (4,5) Graphene wiring structure (100)