• 专利标题:   Roll-to-roll graphene synthesis chamber has auxiliary heaters that are spaced apart from each other and arranged to define auxiliary space for synthesizing graphene on metal film which is placed in auxiliary space.
  • 专利号:   US2019368043-A1
  • 发明人:   WON D, NAM W
  • 专利权人:   HANWHA AEROSPACE CO LTD, NPS CORP
  • 国际专利分类:   B82Y040/00, C23C016/26, C23C016/46, C23C016/48, C23C016/54
  • 专利详细信息:   US2019368043-A1 05 Dec 2019 C23C-016/46 201995 Pages: 24 English
  • 申请详细信息:   US2019368043-A1 US541004 14 Aug 2019
  • 优先权号:   KR023829, KR069490

▎ 摘  要

NOVELTY - The chamber (1500) has a chamber case, a first roller (R1) around which a metal film is wound before graphene is synthesized, and a second roller around which the metal film is wound, after graphene is synthesized. The gas supplier supplies a gas comprising a carbon gas into an inner space of the chamber case. The main heater emits a light to the inner space to heat the metal film. An auxiliary heater absorbs the light emitted by the main heater and emits a radiant heat toward the metal film, and the auxiliary heater comprises a first auxiliary heater and a second auxiliary heater. The first auxiliary heater and the second auxiliary heater are spaced apart from each other and define an auxiliary space for synthesizing graphene on the metal film. The metal film is placed in the auxiliary space. USE - Roll-to-roll graphene synthesis chamber. ADVANTAGE - Since the graphene synthesis chamber uses light having a near-infrared wavelength band, the temperature of roll-to-roll graphene synthesis chamber is easily controlled, the substrate is rapidly heated to a temperature needed to synthesize graphene without heating the entire inner space I, and a temperature is uniformly increased irrespective of a position of the substrate. Since a time taken to increase a temperature to synthesize graphene and a time to reduce the temperature are reduced in this configuration, and hence, the graphene is mass produced. Since light is simultaneously emitted from the main heating units that are arranged over and under the substrate, a temperature of the substrate is uniformly increased, and a time taken to increase the temperature is reduced, and a time taken to synthesize graphene is reduced. The first rotating rollers linearly contact the metal thin film, thus, minimizing friction with the metal thin film and preventing damage to the metal thin film. Since auxiliary heating units are provided, a sharp increase in temperature is prevented, the loss of radiant energy is minimized, a heating time is reduced, and graphene synthesis efficiency is improved. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of graphene synthesis chamber. Gas supply unit (1120) Main heating unit (1140) Lamp (1141) Roll-to-roll graphene synthesis chamber (1500) First roller (R1)