• 专利标题:   Method for preparing stress-controlled graphene film optical fiber Fabry-Perot resonator, involves fixing micro-operation instrument in Poly dimethyl siloxane layer, and fixing graphene film with probe base body stress controlling layer.
  • 专利号:   CN107478251-A, CN107478251-B
  • 发明人:   LI C, LAN T, YU X, FAN S, YANG J
  • 专利权人:   UNIV BEIHANG, BEIJING CHANGCHENG METROLOGY MEASUREME, UNIV BEIHANG, CHINA AVIATION IND CORP CHANGCHENG METRO
  • 国际专利分类:   G01D005/353, G01H009/00
  • 专利详细信息:   CN107478251-A 15 Dec 2017 G01D-005/353 201804 Pages: 10 Chinese
  • 申请详细信息:   CN107478251-A CN10838868 18 Sep 2017
  • 优先权号:   CN10838868

▎ 摘  要

NOVELTY - The method involves cleaning a silicon sheet by using acetone. A top layer structure of an optical fiber locating cap is constructed. An upper surface of a substrate layer is coated with a SU-8 2035 UV gel. A middle layer structure of the optical fiber locating cap is establishing. An oxygen- Ionizing process is performed in the optical fiber locating cap. A UV glue surface is coated with a SU-8100 UV glue. An optical fiber is spliced. A micro-operation instrument is fixed in a Poly dimethyl siloxane (PDMS) layer. A graphene film is fixed with a probe base body stress controlling layer. USE - Method for preparing stress-controlled graphene film optical fiber Fabry-Perot resonator. ADVANTAGE - The method enables realizing simple and compact in structure and improving accuracy in adjusting film stress. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a micro-operation instrument. '(Drawing includes non-English language text)'