• 专利标题:   Probe type optical fiber humidity sensor based on micro-ball echo wall mode, has microsphere that is embedded in capillary tube, and whose outer surface is coated with layer of humidity sensitive film to form humidity sensing head.
  • 专利号:   CN214584894-U
  • 发明人:   XU B, CHEN M, GUO Y
  • 专利权人:   UNIV CHINA JILIANG
  • 国际专利分类:   G01N021/41
  • 专利详细信息:   CN214584894-U 02 Nov 2021 G01N-021/41 202197 Chinese
  • 申请详细信息:   CN214584894-U CN22648564 16 Nov 2020
  • 优先权号:   CN22648564

▎ 摘  要

NOVELTY - The utility model claims a probe type optical fibre humidity sensor based on micro-sphere echo wall mode, wherein The sensor mainly comprises a single-mode optical fibre and a capillary tube; micro-sphere and graphene oxide film; single-mode optical fibre and capillary collapse fusion; a waveguide led out from the single-mode optical fibre core and tightly adhered to the inner wall of the capillary tube and the micro-sphere embedded in the capillary tube for high efficiency coupling and coating a layer of graphene oxide film on the outer surface of the micro-sphere. When applied, the sensor is placed in the humidity space to be measured; the humidity is changed; the sensor resonance peak is caused to drift; using the optical fibre spectrometer to measure the change of the resonance peak value; the value of the humidity to be measured can be demodulated. The invention is featured with high sensitivity, compact structure, low hysteresis effect, good repeatability and so on; it can be used for high precision measurement of humidity.