▎ 摘 要
NOVELTY - The utility model claims a probe type optical fibre humidity sensor based on micro-sphere echo wall mode, wherein The sensor mainly comprises a single-mode optical fibre and a capillary tube; micro-sphere and graphene oxide film; single-mode optical fibre and capillary collapse fusion; a waveguide led out from the single-mode optical fibre core and tightly adhered to the inner wall of the capillary tube and the micro-sphere embedded in the capillary tube for high efficiency coupling and coating a layer of graphene oxide film on the outer surface of the micro-sphere. When applied, the sensor is placed in the humidity space to be measured; the humidity is changed; the sensor resonance peak is caused to drift; using the optical fibre spectrometer to measure the change of the resonance peak value; the value of the humidity to be measured can be demodulated. The invention is featured with high sensitivity, compact structure, low hysteresis effect, good repeatability and so on; it can be used for high precision measurement of humidity.