• 专利标题:   Mobile multi-station deposition furnace used for depositing graphene, comprises horizontal group set with graphene deposition system, furnace body, and moving body which can switch the graphene deposition system.
  • 专利号:   CN203846100-U
  • 发明人:   JIN H, LIU Z, PENG P, YANG H, ZHANG Z, ZHOU Z
  • 专利权人:   CHANGZHOU ERWEI CARBON TECHNOLOGY CO LTD
  • 国际专利分类:   C23C016/26, C23C016/44
  • 专利详细信息:   CN203846100-U 24 Sep 2014 C23C-016/26 201501 Pages: 10 Chinese
  • 申请详细信息:   CN203846100-U CN20822356 12 Dec 2013
  • 优先权号:   CN20822356

▎ 摘  要

NOVELTY - This utility new type furnace technology field, relates to an apparatus for depositing graphene deposition system especially relates to a depositing graphene with one mobile multi-station deposition furnace, comprise multiple horizontal set with a group and used for heating graphite deposition system of a furnace body, a furnace body can be switched several group graphene deposition system. This utility new type one of a depositing graphene with mobile multi-station deposition furnace, a rear furnace body is deposited from a deposition area, a cover set with inner air shower system and exhaust system of a a graphene is deposited a fast cooling, which greatly shortens the cooling time, one group a furnace body corresponding to multi-group graphene deposition system, are independently each other, a multi-station operation of deposition process, a the first set time, for other set sampling process, vacuum process and so on, which avoids the unnecessary deposition preamble period time, saves the resource, shortens the depositing period, increase the production efficiency.