▎ 摘　　要

NOVELTY - The sensor has a humidity sensitive housing (11) containing a graphene (21) oriented in an in-plane direction of a main surface of the moisture sensitive housing. The peak intensity ratio of the 110 plane to the 002 plane by an X-ray diffraction method of the moisture sensitive housing is 0.5%. The oxygen content in the center of the moisture sensitive housing is 5% or less along a thickness direction perpendicular to the in-plane direction of the principal surface of the moisture sensitive housing. The thickness of the moisture sensitive housing is greater than or equal to 0.020 μ m and less than 2.0 μ m. The oxygen content on the outermost surface of the main surface of the moisture sensitive housing is 8% or more and less than 20%. USE - Humidity sensor such as electrostatic capacity change type humidity sensor and resistance change type humidity sensor provided in gas chamber capable of controlling acetone concentration. Uses include but are not limited to industrial, agriculture, environmental, automotive, healthcare and medical areas. ADVANTAGE - The humidity sensor has high flexible property, suitable conductivity and suitable humidity sensitivity, and the humidity sensitive housing has high selectivity to humidity. Therefore, the electrode is also required to have a flexible property, and the choice of the electrode material is limited. Since the shape and size of the humidity sensor are limited to use a comb-shaped electrode, the humidity sensor is miniaturized, and the cost reduction is difficult. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the humidity sensor. 11Humidity sensitive housing 21Graphene