▎ 摘　　要

NOVELTY - The system includes a piezoelectric actuator or a nozzle module. The system housing is configured to carry out electrical discharge, piezo actuator pause, hydraulic coupler fluid pressure reduction, pressure control valve closure, needle closure and gas injection pause orderly. The operation time of the system housing less than 100 mu s is controlled to make a best use of an injection period as to a board layer by a concentration distribution of the carbon-included gas on the surface of a substrate to make the uneven concentration distribution in a parallel direction. USE - Piezo injection system of gas blower for use in noncatalytic substrate growth graphene manufacturing device. ADVANTAGE - The sub-range of the group, and the coverage of the group are realized. The granule size which is in parallel direction to the surface of the noncatalytic substrate growth graphene is large than the granule size in the surface of the corresponding noncatalytic substrate growth graphene. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating the process of piezo injection system. (Drawing includes non-English language text) Board layer (100) Carbon-included gas (300) Graphene (500)