▎ 摘 要
NOVELTY - Preparing suspended graphene structure comprises (1) processing diaphragm to perform patterning to obtain the patterned area and the remaining areas, where the membrane to be processed includes a sacrificial layer, a graphene sheet layer and an electron beam glue layer arranged in sequence, and the membrane to be processed includes a sacrificial layer, a graphene sheet layer and an electron beam glue layer arranged in sequence, and (2) removing remaining regions and the sacrificial layer in sequence, and transferring the patterned regions to the substrate to obtain the suspended graphene structure. USE - The suspended graphene structure is useful for preparing microelectromechanical systems (claimed). ADVANTAGE - The method: does not involve corrosive liquid; is simple; realizes easy transfer and assemble of graphene; and achieves preparation of suspended structures of graphene materials with different shapes and different sizes. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for suspended graphene structure.