▎ 摘 要
NOVELTY - Self-powered sensing micro system based on laser-induced graphene process comprises laser-induced graphene (LIG) energy storage element layer, polyimide (PI) substrate layer and LIG function and energy collecting element layer. The PI substrate layer serves as the structural connection layer and electrical insulation layer of the LIG energy storage element layer, the LIG function and the energy collection element layer. The LIG sensing function element and the LIG energy collection element are prepared on the front of the system. The LIG energy storage element is prepared on the back of the system. The PI substrate layer serves as a laser-induced precursor. Specific parameters are selected for LIG sensing function element, LIG energy storage element and LIG energy collection element to induce LIG electrode. USE - Used as self-powered sensing micro system based on laser-induced graphene process. ADVANTAGE - The system: utilizes a single-step laser-induced PI substrate to obtain LIG; realizes a complete set of sensing micro-system components including sensing elements, energy harvesting elements, energy storage elements, and system interconnect lines; and integrates the process level and performance level of portable electronic device. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of the self-powered sensing micro system based on laser-induced graphene process (Drawing includes non-English language text).