• 专利标题:   Semiconductor device e.g. NAND-type memory devices comprises catalytic metal film formed above substrate, graphene film formed on catalytic metal film, contact plug connected to graphene film, adjustment film, and dielectric film.
  • 专利号:   US2012068160-A1, JP2012064784-A, JP5150690-B2, US8378335-B2
  • 发明人:   YAMAZAKI Y, WADA M, SAKAI T
  • 专利权人:   TOSHIBA KK, TOSHIBA KK
  • 国际专利分类:   B82Y099/00, H01L021/20, H01L029/12, H01L021/3205, H01L021/768, H01L023/52, H01L023/532, H01L029/06
  • 专利详细信息:   US2012068160-A1 22 Mar 2012 H01L-029/12 201222 Pages: 15 English
  • 申请详细信息:   US2012068160-A1 US075591 30 Mar 2011
  • 优先权号:   JP208131

▎ 摘  要

NOVELTY - The semiconductor device comprises a catalytic metal film (220) formed above a substrate (200), a graphene film (230) formed on the catalytic metal film, a contact plug (240) connected to the graphene film, an adjustment film (250) formed in a region other than a region connected to the contact plug of a surface of the graphene film to adjust a Dirac point position in a same direction as the region connected to the contact plug with respect to a Fermi level, and a dielectric film formed on the adjustment film and on a side surface of the contact plug. USE - Used as a semiconductor device such as NAND-type memory devices. ADVANTAGE - The semiconductor device exhibits high current density resistance, mobility and heat resistance, improved high mechanical strength, and low-conductivity. DETAILED DESCRIPTION - The semiconductor device comprises a catalytic metal film (220) formed above a substrate (200), a graphene film (230) formed on the catalytic metal film, a contact plug (240) connected to the graphene film, an adjustment film (250) formed in a region other than a region connected to the contact plug of a surface of the graphene film to adjust a Dirac point position in a same direction as the region connected to the contact plug with respect to a Fermi level, and a dielectric film formed on the adjustment film and on a side surface of the contact plug. An energy band structure in the region connected to the adjustment film of the surface of the graphene film is symmetric with respect to an energy axis including a Dirac point and a straight line in a wave number direction. A difference between the Dirac point position in the region connected to the contact plug of the surface of the graphene film and the Dirac point position in the region connected to the adjustment film is less than or equal to plus minus 0.5 eV. The adjustment film comprises a material consisting of a metal, an organic compound and/or an inorganic compound, and is formed thinner than the contact plug. The graphene film is formed with 1-20 layers. An INDEPENDENT CLAIM is included for a method for fabricating a semiconductor device. DESCRIPTION OF DRAWING(S) - The diagram shows a schematic view of a semiconductor device. Substrate (200) Catalytic metal film (220) Graphene film (230) Contact plug (240) Adjustment film (250) Barrier metal film. (270)