• 专利标题:   Nitride thin film structure based on amorphous substrate, has graphene buffer layer formed on amorphous substrate, nano-structure supporting layer formed on buffer layer, and nitride thin film formed on nano-structure supporting layer.
  • 专利号:   CN111697115-A
  • 发明人:   YI X, WANG Y, LIU Z, LIANG M, WANG B, REN F, YIN Y, WANG J, LI J
  • 专利权人:   INST SEMICONDUCTORS CHINESE ACAD SCI
  • 国际专利分类:   H01L033/12, H01L033/02, H01L021/02, H01L033/00, B82Y040/00
  • 专利详细信息:   CN111697115-A 22 Sep 2020 H01L-033/12 202091 Pages: 7 Chinese
  • 申请详细信息:   CN111697115-A CN10201508 15 Mar 2019
  • 优先权号:   CN10201508

▎ 摘  要

NOVELTY - The structure has a graphene buffer layer (2) which is formed on an amorphous substrate (1). A nano-structure supporting layer (3) is formed on the graphene buffer layer. A nitride thin film (4) is formed on the nano-structure supporting layer. The amorphous substrate is a quartz substrate, a glass substrate or a silicon dioxide substrate, and the thickness of amorphous substrate is 0.5mm-1.0mm. The graphene buffer layer is one layer or multiple layers and the thickness is 0.4nm-3.0nm. The nano-structure supporting layer is nano-wire, nano-column, nano-cone or nano-micro-disk structure, and the thickness of nano-structure supporting layer is 100nm500nm. USE - Nitride thin film structure based on amorphous substrate. ADVANTAGE - The nitride thin film structure based on amorphous substrate prepares nitride optoelectronic device on the amorphous substrate, reduces the production cost and expands application range. The nitride thin film structure develops new road for nitride optoelectronic device preparation. The nitride thin film structure reduces the technical difficulty and production cost. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for preparing nitride thin film structure. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the nitride thin film structure based on amorphous substrate. Amorphous substrate (1) Graphene buffer layer (2) Nano-structure supporting layer (3) Nitride thin film (4)