• 专利标题:   Graphene film preparation device useful for heating in pipe, comprises heating element, which is embedded in the quartz tube and forming heating cavity with quartz tube, the heating cavity is placed by substrate, and air supply assembly forming graphene film on the substrate.
  • 专利号:   CN114107942-A, CN114107942-B
  • 发明人:   QING F, LI X, HE Q
  • 专利权人:   UNIV ELECTRONIC SCI TECHNOLOGY, UNIV CHINA ELECTRONIC SCI TECHNOLOGY
  • 国际专利分类:   C01B032/186, C23C016/26, C23C016/44, C23C016/458, C23C016/46
  • 专利详细信息:   CN114107942-A 01 Mar 2022 C23C-016/26 202238 Chinese
  • 申请详细信息:   CN114107942-A CN11438987 30 Nov 2021
  • 优先权号:   CN11438987

▎ 摘  要

NOVELTY - Graphene film preparation device comprises a case (2), whose top part is provided with the quartz tube (1) comprising an air inlet end and an air outlet end, which is connected with an air supply assembly (3), the air outlet end is connected with a vacuum assembly (4), the electric heating component comprises a temperature control component and a heating element (6), the temperature control component is set in the case, the heating element is electrically connected with the temperature control component, the heating element is embedded in the quartz tube and forming a heating cavity with the quartz tube, the heating cavity is placed with a substrate, the air supply assembly provides a precursor to the heating cavity and forms a graphene film on the substrate. USE - The graphene film preparation device is useful for heating in pipe (claimed). ADVANTAGE - The device: provides heating element to generate heat by directly transmitted to the heating cavity, thus the reaction rate of the gas is accelerated, reduce the time for forming the graphene film, reduce the heat consumption of forming graphene film, improve the whole efficiency of graphene film, and adopts water circulation mode, reduce the waste of the resource can be improved, uses supporting arm i.e. set to support the quartz tube, can avoid quartz tube to generate displacement, uses quartz tube, which has the requirement of sealing property, provides heating element i.e. electrified through the sealing conductive assembly, which is not only can ensure that quartz tube is in the sealed state, but also can make heating element to be electrified. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for preparing the graphene film using the graphene film preparation device. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the graphene film preparation device for heating in pipe. Quartz tube (1) Case (2) Air supply assembly (3) Vacuum assembly (4) Heating element (6)