▎ 摘　　要

NOVELTY - Microsupercapacitor (MSC) comprises multiple of interdigitated microelectrodes; and reduced graphene oxide (rGO) disposed on the multiple of interdigitated microelectrodes, combined total surface area of an upper surface of each interdigitated microelectrode of the multiple of interdigitated microelectrodes being no more than 30 square millimeters (mm2), the MSC having an average capacitance of at least 500 microFarads per square centimeter (μF/cm2) at a scan rate of 2 millivolts per second (mV/s), the rGO being disposed on the multiple of interdigitated microelectrodes as vertically aligned nanosheets of the rGO, and the rGO covering at least 95% of the upper surface of each interdigitated microelectrode of the multiple of interdigitated microelectrodes. USE - Microsupercapacitor (MSC) for use in microelectronic devices, such as embedded micro-sized energy storage systems that can directly be directly integrated with other micro-electronic components. ADVANTAGE - The MSC has a high capacitance and high stability even after 50,000 cycles. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method of fabricating a microsupercapacitor. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a fabrication process for an interdigitated micro-current collector. 10Substrate 20Photoresist 30Mask 40Metal 50UV light