• 专利标题:   Graphene pressure sensor, has sensor main body whose bottom part is arranged with PVDF piezoelectric thin film, two graphene layers and boron nitride layer, and two electrodes covered with two graphene layers, respectively.
  • 专利号:   CN104617090-A
  • 发明人:   CHEN H, LIN S, LI X, XU Z, WANG P, WU Z, ZHANG C, ZHONG H
  • 专利权人:   UNIV ZHEJIANG
  • 国际专利分类:   G01L001/16, G01L009/08, H01L027/01
  • 专利详细信息:   CN104617090-A 13 May 2015 H01L-027/01 201555 Pages: 6 Chinese
  • 申请详细信息:   CN104617090-A CN10023523 16 Jan 2015
  • 优先权号:   CN10023523

▎ 摘  要

NOVELTY - The sensor has a sensor main body whose bottom part is arranged with a PVDF piezoelectric thin film (1), two graphene layers (2, 4) and a boron nitride layer (3). A piezoelectric sensor is provided two electrodes (5, 6). One of the electrodes is covered with one of the graphene layers. Another electrode is covered with another graphene layer. The electrodes are made of gold, palladium, silver, titanium, nickel and chromium. USE - Graphene pressure sensor. ADVANTAGE - The sensor is easy to integrate and detect graphene pressure, and improves piezoelectric property of the PVDF piezoelectric thin film, light transmittance and conductivity of graphene material. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a graphene pressure sensor manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a graphene pressure sensor. PVDF piezoelectric thin film (1) Graphene layers (2, 4) Boron nitride layer (3) Electrodes (5, 6)