• 专利标题:   Preparing image sensor involves depositing active passivation layer on image sensor light incidence surface, growing transparent conductive film on active passivation layer surface, and forming metal wire for electrically connecting transparent film and control circuit.
  • 专利号:   CN114582897-A
  • 发明人:   ZHANG B, CHEN S, HUANG W, ZHANG S
  • 专利权人:   UNITED MICROELECTRONICS CENT CO LTD
  • 国际专利分类:   H01L027/146
  • 专利详细信息:   CN114582897-A 03 Jun 2022 H01L-027/146 202263 Chinese
  • 申请详细信息:   CN114582897-A CN11371363 30 Nov 2020
  • 优先权号:   CN11371363

▎ 摘  要

NOVELTY - Preparing image sensor (202) involves depositing an active passivation layer on an image sensor light incidence surface. The active passivation layer is provided with a charge storage area. Transparent conductive film (207) is grown on the surface of the active passivated layer. The conductive layer is patterned. Corresponding portion of the conductive film is removed to expose a control circuit (201) arranged in the image sensor. Metal wire (209) is electrically connected with the transparent conductivity membrane and the control circuit. USE - Method for preparing image sensor. ADVANTAGE - The method enables capturing and storing the electrons through the active passivation layer, so that the photo-generated electrons are not easy to reach the light incidence surface of the image sensor, to reduce the surface-dark current, greatly improves the quality of the imaging sensor, and electrically connected with the control circuit through the transparent conductive film. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for an image sensor, which has an active passivation layer, the active passivation layer includes a charge storage region, a transparent conductive film covering the active passivation layer, an insulating layer covering the sidewall of the active passivation layer, a metal wire that electrically connects the transparent conductive film and the control circuit. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the steps of preparing image sensor. Control circuit (201) Image sensor (202) Transparent conductive film (207) Metal wire (209)