▎ 摘　　要

NOVELTY - Preparation of single crystal copper substrate of graphene growth involves fixing end of quartz rod on spiral drive screw slide table of stepper motor; placing industrial copper foil on front end of quartz rod; sending stepper motor spiral drive screw slide table together with quartz rod into quartz tube of chemical vapor deposition (CVD) system; let stepper motor spiral drive screw slide table and quartz rod as whole at left entrance of quartz tube of CVD system; clicking CVD operation screen to vacuumize quartz tube at 20-30 Pa; heating industrial copper foil under hydrogen flowrate of 5-10 standard cubic centimeter per minute (sccm) at 1050 degrees C for 30-40 minutes; and annealing industrial copper foil under hydrogen flowrate of 20-30 sccm at 1030-1050 degrees C for 20-90 minutes; and moving quartz rod with copper foil driven by stepper motor and passing through heating temperature zone of CVD system to obtain single crystal copper substrate. USE - The method is for preparation of single crystal copper substrate used for growing graphene (claimed). ADVANTAGE - The method reduces unnecessary pollution, improves accuracy of experiment, and reduces purchase cost of experimental equipment and production equipment. It does not require resetting of parameters after each step of operation, thus simplifying experimental operation process while reducing labor costs and avoiding human errors. DETAILED DESCRIPTION - Preparation of single crystal copper substrate for graphene growth by stepper motor in vacuum comprises setting computer numerical control (CNC) stepper motor consisting of variable energy program debugging control system V170419, bluetooth driver, bluetooth serial port download line, drive controller, switching power supply, stepper driver, stepper motor screw drive screw slide table, and quartz rod; connecting stepper driver and drive controller; connecting switching power supply and drive controller; connecting bluetooth serial download line and drive controller; downloading variable energy program to debug control system V170419 and bluetooth driver on computer and download it into driver controller through bluetooth download line; connecting stepper driver and stepper motor; fixing end of quartz rod on spiral drive screw slide table of stepper motor; placing industrial copper foil on front end of quartz rod; sending stepper motor spiral drive screw slide table together with quartz rod into quartz tube of chemical vapor deposition (CVD) system; let stepper motor spiral drive screw slide table and quartz rod as whole at left entrance of quartz tube of CVD system, in which initial position of copper foil is at left edge of heating zone of CVD system, bluetooth serial port download line, drive controller, switching power supply, and stepper drivers are all placed outside of CVD system; clicking CVD operation screen to vacuumize quartz tube at 20-30 Pa; heating industrial copper foil under hydrogen flowrate of 5-10 sccm, highest heating temperature at 1050 degrees C for 30-40 minutes without requiring to operate drive controller to change position of quartz rod, in which copper foil is located at left edge of heating zone; and annealing industrial copper foil under hydrogen flowrate of 20-30 sccm at 1030-1050 degrees C for 20-90 minutes; and moving quartz rod with copper foil driven by stepper motor and passing through heating temperature zone of CVD system to obtain single crystal copper substrate. An INDEPENDENT CLAIM is included for computer numerical control (CNC) stepper motor comprising variable energy program debugging control system V170419, bluetooth driver, bluetooth serial port download line, drive controller, switching power supply, stepper driver, stepper motor screw drive screw slide table, and quartz rod. INDEPENDENT CLAIMS are included for: (1) computer numerical control (CNC) stepper motor comprising variable energy program debugging control system V170419, bluetooth driver, bluetooth serial port download line, drive controller, switching power supply, stepper driver, stepper motor screw drive screw slide table, and quartz rod; and (2) use of single crystal copper substrate for growing graphene.