• 专利标题:   Preparing nitrogen-doped graphene involves placing phosphorus pentoxide powder in quartz crucible, cleaning and drying silicon substrate, plating layer of metal catalyst thin film on silicon substrate, and evacuating obtained product.
  • 专利号:   CN108910867-A
  • 发明人:   CHEN M, MA S
  • 专利权人:   HENGLI XIAMEN GRAPHENE SCI TECHNOLOGY IND GROUP CO LTD
  • 国际专利分类:   C01B032/186
  • 专利详细信息:   CN108910867-A 30 Nov 2018 C01B-032/186 201908 Pages: 6 Chinese
  • 申请详细信息:   CN108910867-A CN10824857 25 Jul 2018
  • 优先权号:   CN10824857

▎ 摘  要

NOVELTY - The method for preparing nitrogen-doped graphene by microwave plasma chemical vapor deposition involves placing phosphorus pentoxide powder in a quartz crucible, cleaning and drying silicon substrate, plating a layer of metal catalyst thin film on the silicon substrate, then placing in a deposition chamber, evacuating and introducing nitrogen gas into the deposition chamber at flow rate of 10-30 cm3/minute, introducing methane at flow rate of 25-300 cm3/minute, controlling the concentration of methane in the reaction deposition chamber at 1-5% and nitrogen concentration at 0.1-0.5 vol.%, exciting microwave adjustment microwave transmitter power at 100-1000 W, adjusting the pressure to 400-1300 Pa, heating at heating rate of 1-10 degrees C/minute to 400-900 degrees C for 15-60 minutes and cooling to room temperature. USE - The method is useful for preparing nitrogen-doped graphene. ADVANTAGE - The method enables simple and economical preparation of nitrogen-doped graphene with high yield in an environmentally-friendly manner.