▎ 摘 要
NOVELTY - The crystal has a first insulating layer (102) formed on a substrate (101). A second insulating layer (103) is formed on the first insulating layer. A groove (105) is formed on the first insulating layer and the second insulating layer. The groove is formed with multiple supporting columns extending from a bottom unit of the groove. Multiple supporting columns are formed by the first insulating layer and the second insulating layer. A gate electrode (202) is formed at a bottom unit of the groove. A source/drain electrode is formed on the second insulating layer. A vibration layer (401) covers a unit of the source/drain electrodes and a support column (104). The vibration layer is adapted to generate resonant vibration. USE - Nano phonon crystal used for preparing acoustic band-pass/band-stop filter with specific frequency. ADVANTAGE - The crystal stretches and controls energy band on a same nano phonon crystal by covering the vibrating layer on a unit of the source and drain electrode and the supporting column arranged in array in the groove, and forms a non-contact by applying voltage on a grid so as to improve integrated beneficial effect of a device. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a nano phonon crystal manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a nano phonon crystal. Substrate (101) First insulating layer (102) Second insulating layer (103) Support column (104) Groove (105) First metal layer (201) Gate electrode (202) Vibration layer (401)