▎ 摘 要
NOVELTY - The sensor has a graphene layer main body (32) fixed on a top end of a high refractive layer (31), where a cavity structure layer (33) is fixed on a top of the graphene layer main body. A periodic sub-wavelength metal grating array (2) is fixed at a top side of the cavity structure layer. The high and low refractive index medium layer mixed structure (11) is provided with a low-refractive index layer of an upper layer and a high-refractory index layer on a lower layer. USE - Visible light wave band high FOM bio-chemical sensor for use in a metal micro-nano device, for real-time dynamic monitoring of heavy oil water content percentage in an industrial production (claimed). ADVANTAGE - By optimizing the thickness of the high/low refractive index medium layer mixed structure, the cavity length of the cavity structure and the cavity width and the width and height of the grating and the periodic sub-wavelength metal grating array period structure parameter are adjusted to adjust the sensitivity and quality factor of the sensor, the comprehensive evaluation index of sensor can reach high level. The high FOM biochemical sensor of visible light wave band, aiming at obtaining high S and FOM sensing index at the same time, and simplifying the sensor structure. DESCRIPTION OF DRAWING(S) - The drawing shows a structural diagram of a visible light wave band high-FOM biochemical sensor. Periodic sub-wavelength metal grating array (2) High and low refractive index medium layer mixed structure (11) High refractive layer (31) Graphene layer main body (32) Cavity structure layer (33)