• 专利标题:   Forming graphene nanomesh used for electronic devices, comprises depositing metal seed layer on substrate via physical vapor deposition, and growing graphene layer on the metal seed layer via chemical vapor deposition.
  • 专利号:   WO2021133159-A1
  • 发明人:   LEE M W, LEE H W, SORIADI N, ADOM A H
  • 专利权人:   MIMOS BERHAD
  • 国际专利分类:   H01L021/205, C01B032/186
  • 专利详细信息:   WO2021133159-A1 01 Jul 2021 202157 Pages: 16 English
  • 申请详细信息:   WO2021133159-A1 WOMY050133 05 Nov 2020
  • 优先权号:   MY007772

▎ 摘  要

NOVELTY - Forming graphene nanomesh, comprises: depositing a metal seed layer (20) on a substrate (10) via physical vapor deposition, where thickness of the metal seed layer is 100-500 nm; and growing a graphene layer (30) on the metal seed layer via chemical vapor deposition, at 700-1000 degrees C, where the graphene layer grows into the graphene nanomesh on the metal seed layer. USE - The method is useful for forming graphene nanomesh on a large area under a direct growth to improve the graphene properties for electronic devices. ADVANTAGE - The method: involves a direct one-step process, hence saves fabrication time and cost and enables large scale production; and enables better distribution and higher concentration of defective regions on the graphene layer to improve sensing characteristics of the graphene and hence improves device performance. DESCRIPTION OF DRAWING(S) - The figure shows a schematic view of method of forming graphene nanomesh. Substrate (10) Thin metal seed layer (20) Graphene layer (30) In-situ holes (40) Permanent substrate (50)