• 专利标题:   Method for manufacturing edge of graphene pattern, involves preparing graphene thin film, and performing photo-etching and oxygen plasma etching processes for patterning graphene thin film to obtain edge of graphene.
  • 专利号:   CN103021808-A
  • 发明人:   ZUO Q, KANG X, ZENG S
  • 专利权人:   SHANGHAI IC R D CENT CO LTD
  • 国际专利分类:   H01L021/02
  • 专利详细信息:   CN103021808-A 03 Apr 2013 H01L-021/02 201363 Chinese
  • 申请详细信息:   CN103021808-A CN10496825 29 Nov 2012
  • 优先权号:   CN10496825

▎ 摘  要

NOVELTY - The method involves preparing a graphene thin film. An Artificial defect part is arranged on the graphene thin film. An anisotropic etching process is carried out on the graphene thin film to form a graphite dilute crystal orientation mark pattern along the artificial defect part. The graphene thin film and the graphene crystal orientation mark pattern are aligned on a target substrate. Photo-etching and oxygen plasma etching processes are performed for patterning the graphene thin film to obtain an edge of graphene. USE - Method for manufacturing an edge of a graphene pattern. ADVANTAGE - The method enables improving performance and application range of a graphene film and simplifying manufacturing process. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a method for manufacturing an edge of graphene pattern.'(Drawing includes non-English language text)'