• 专利标题:   Method for manufacturing semiconductor device, involves sticking graphene layer on substrate with semiconductor elements and forming grapheme wires by processing graphene layer into wiring pattern.
  • 专利号:   US2015056807-A1
  • 发明人:   WADA M, KAJITA A, ISOBAYASHI A, SAITO T
  • 专利权人:   TOSHIBA KK
  • 国际专利分类:   H01L021/3205, H01L021/768, H01L023/544
  • 专利详细信息:   US2015056807-A1 26 Feb 2015 H01L-021/768 201518 Pages: 13 English
  • 申请详细信息:   US2015056807-A1 US531738 03 Nov 2014
  • 优先权号:   JP198266

▎ 摘  要

NOVELTY - The method involves sticking a graphene layer (33) on a first substrate (10) with semiconductor elements (14) formed. The graphene wires are formed by processing the graphene layer into a wiring pattern. The graphene layer is formed on a second substrate (11). The sticking of the graphene layer has sticking the graphene layer on first substrate with a connection insulating film placed. The first substrate has the semiconductor elements are formed at temperatures of not higher than 400 degrees C. USE - Method for manufacturing semiconductor device. ADVANTAGE - Since the extra amount of the graphene layers are reduced, thus the wiring process of the graphene layers is easily performed is obtained. The rate of the density of defects occurring in a graphene sheet increases, thus increasing the wiring resistance. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of a semiconductor device. First substrate (10) Second substrate (11) Semiconductor element (14) Insulating film (20) Graphene layer (33)