▎ 摘　　要

NOVELTY - A pellicle comprises a central layer formed on a pellicle frame, and a surface layer formed by heat treatment to include any one or more elements of carbon, nitrogen, and oxygen on the outside of the central layer. USE - Pellicle used for extreme UV lithography. ADVANTAGE - The pellicle has excellent heat dissipation performance, stability in extreme UV lithography environment, and excellent mechanical strength.