▎ 摘 要
NOVELTY - The utility model claims a graphite heater for chemical vapor deposition graphite alkene, comprising a graphite electrode and a heating component connected with the water cooling copper electrode of the gas phase deposition furnace, the heating component comprises an electric part and a heating rod, the heating rod is cylindrical and the middle part is thick and two ends are thin, two ends of the heating rod are fixed by the electric square, the heating rod is detachably connected with the electric part, the side wall of the electric side is connected with a graphite electrode. adjusting the heating temperature by the heating rod with variable diameter, heating the heating temperature at two ends of the heating rod, so as to ensure the temperature uniformity of the vacuum chemical vapour deposition furnace graphene the growth area of the film, so as to ensure the stability of the chemical vapour deposition process, improving the quality of the film graphene In addition, each component is detachably connected, it is convenient to assemble and disassemble, it can change the single component, and it is low in maintenance costs