• 专利标题:   Graphite heater for chemical vapor deposition graphite alkene comprises graphite electrode connected with water cooling copper electrode of gas phase deposition furnace and heating component comprising electric part and heating rod.
  • 专利号:   CN218277169-U
  • 发明人:   WANG J, XU A, XUE Y
  • 专利权人:   SHANDONG WEIJI CARBON TECH CO LTD
  • 国际专利分类:   C01B032/186, H05B001/02, H05B003/00, H05B003/03, H05B003/06, H05B003/14, H05B003/42
  • 专利详细信息:   CN218277169-U 10 Jan 2023 H05B-001/02 202309 Chinese
  • 申请详细信息:   CN218277169-U CN22428321 14 Sep 2022
  • 优先权号:   CN22428321

▎ 摘  要

NOVELTY - The utility model claims a graphite heater for chemical vapor deposition graphite alkene, comprising a graphite electrode and a heating component connected with the water cooling copper electrode of the gas phase deposition furnace, the heating component comprises an electric part and a heating rod, the heating rod is cylindrical and the middle part is thick and two ends are thin, two ends of the heating rod are fixed by the electric square, the heating rod is detachably connected with the electric part, the side wall of the electric side is connected with a graphite electrode. adjusting the heating temperature by the heating rod with variable diameter, heating the heating temperature at two ends of the heating rod, so as to ensure the temperature uniformity of the vacuum chemical vapour deposition furnace graphene the growth area of the film, so as to ensure the stability of the chemical vapour deposition process, improving the quality of the film graphene In addition, each component is detachably connected, it is convenient to assemble and disassemble, it can change the single component, and it is low in maintenance costs