• 专利标题:   Graphene thin film etching device has etching plate whose inner side bottom surface is concave arc surface, where central position of bottom side surface of plate is provided with cylindrical hole.
  • 专利号:   CN113735104-A, CN113735104-B
  • 发明人:   HUANG F
  • 专利权人:   ZHANGJIAGANG DONGDA IND TECHNOLOGY RES
  • 国际专利分类:   C01B032/194
  • 专利详细信息:   CN113735104-A 03 Dec 2021 C01B-032/194 202220 Chinese
  • 申请详细信息:   CN113735104-A CN11273444 29 Oct 2021
  • 优先权号:   CN11273444

▎ 摘  要

NOVELTY - The device has a control device that passes through an axial side wall of an outer shell and extends into the inner part of the outer shell. An etching device (2) comprises an etching plate (21) that is fixedly connected with the axial inner side of the outer shell. The inner side bottom surface of the etching plate is provided with several equidistantly distributed strip-shaped convex grooves (22) on the axial direction of the etching plate. The etching plate is provided with multiple uniformly distributed through-holes. The inner side of the bottom end portion of the convex grooves is fixedly installed with a photosensitive resistor. The etching plate is provided with an irradiation lamp (25). The inner side bottom surface of the etching plate is concave arc surface. The central position of the bottom side surface of the etching plate is provided with a cylindrical hole. USE - Graphene thin film etching device. ADVANTAGE - The graphene film etching device is provided with a strip-shaped convex groove, so that the bubble generated by the injection etching liquid can be discharged outwards through the gap between the adjacent long convex grooves, so as to reach the effect of stopping bubble stacking between the graphene film and the etching liquid, thus solving the problem that the etching effect caused by bubble accumulation is not good. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of an etching disk. Etching device (2) Etching plate (21) Strip-shaped convex groove (22) Irradiation lamp (25)