• 专利标题:   Graphene fiber-based optic temperature sensor for semiconductor device, comprises ordinary circular optical fiber section having specific length, fiber sensing area, sensing area portion and graphene oxide film.
  • 专利号:   CN103335741-A, CN103335741-B
  • 发明人:   CAI X, CHEN Z, TANG J, YU J, XIAO Y, ZHANG J, LIAO G, LU H
  • 专利权人:   UNIV JINAN
  • 国际专利分类:   C01B031/04, G01K011/32
  • 专利详细信息:   CN103335741-A 02 Oct 2013 G01K-011/32 201403 Pages: 13 Chinese
  • 申请详细信息:   CN103335741-A CN10242766 19 Jun 2013
  • 优先权号:   CN10242766

▎ 摘  要

NOVELTY - A graphene fiber-based optic temperature sensor comprises an ordinary circular optical fiber section having length of 1-3 cm, a fiber sensing area, a sensing area portion and a graphene oxide film having thickness of 10-30 mu m. The shortest distance of the fiber cladding and the core of the interface is 1-3 mu m. USE - Graphene fiber-based optic temperature sensor is used for semiconductor device (claimed). ADVANTAGE - The graphene fiber-based optic temperature sensor has high response speed, sensitivity, durability and anti-electromagnetic interference property. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) manufacture of graphene fiber-based optic temperature sensor; and (2) manufacture of semiconductor device.