▎ 摘 要
NOVELTY - A graphene fiber-based optic temperature sensor comprises an ordinary circular optical fiber section having length of 1-3 cm, a fiber sensing area, a sensing area portion and a graphene oxide film having thickness of 10-30 mu m. The shortest distance of the fiber cladding and the core of the interface is 1-3 mu m. USE - Graphene fiber-based optic temperature sensor is used for semiconductor device (claimed). ADVANTAGE - The graphene fiber-based optic temperature sensor has high response speed, sensitivity, durability and anti-electromagnetic interference property. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) manufacture of graphene fiber-based optic temperature sensor; and (2) manufacture of semiconductor device.