• 专利标题:   Two-dimensional horizontal super lattice structure template, has multiple types of two-dimensional materials form super lattice, where multiple types of materials have different strains.
  • 专利号:   KR2023078473-A
  • 发明人:   KANGKIBUM, PARK J
  • 专利权人:   KOREA ADVANCED SCI TECHNOLOGY INST
  • 国际专利分类:   H01L021/02, H01L021/285, H01L021/3065, H01L021/308, H01L021/32, H10N070/00
  • 专利详细信息:   KR2023078473-A 02 Jun 2023 H01L-021/308 202349 Pages: 11
  • 申请详细信息:   KR2023078473-A KR053562 29 Apr 2022
  • 优先权号:   KR165231

▎ 摘  要

NOVELTY - The template has multiple types of two-dimensional (2D) materials (102) that form a super lattice (104), where the two or multiple types of materials have different strains. The material deposited during the deposition process is selectively deposited on only one of the 2D materials having different strains, where a deposition process includes chemical vapor deposition (CVD) or an atomic liquid deposition (ALD) process. The deposited material is selected from aluminum oxide, hafnium oxide, ruthenium, antimony telluride and tellurium selenide. The 2D material of the template includes transition metal dichalcogenide and graphene. USE - 2D horizontal superlattice structure template. ADVANTAGE - The 2D horizontal superlattice structure template can be effectively used for precise hard mask realization, metal and channel layer selective deposition. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for facilitating depositing process using a 2D horizontal superlattice structure template. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of the 2D horizontal superlattice structure template. 100Silicon oxide substrates 102Two-dimensional materials 104Super lattice