• 专利标题:   Thin film graphene atomic oxygen detecting structure, has thin film whose two sides are plated with electrode that is connected with external measuring circuit, and silicon substrate arranged with silicon dioxide dielectric layer.
  • 专利号:   CN106680325-A, CN106680325-B
  • 发明人:   LIU Y, LIU X, LI M, SHEN Z, ZHANG K, ZHAO C
  • 专利权人:   BEIJING INST SPACECRAFT ENVIRONMENT ENG, BEIJING INST SPACECRAFT ENVIRONMENT ENG
  • 国际专利分类:   G01N027/04
  • 专利详细信息:   CN106680325-A 17 May 2017 G01N-027/04 201742 Pages: 7 Chinese
  • 申请详细信息:   CN106680325-A CN10766867 11 Nov 2015
  • 优先权号:   CN10766867

▎ 摘  要

NOVELTY - The structure has a thin film whose two sides are plated with electrode that is connected with an external measuring circuit. A quartz glass or silicon substrate is arranged with silicon dioxide dielectric layer and uniformly coated with liquid through spin to obtain a film body of desired thickness. USE - Thin film graphene atomic oxygen detecting structure. ADVANTAGE - The structure is simple to prepare, and improves working time of orbit of oxygen for more than five years. DETAILED DESCRIPTION - The thin film is made of -90 to 10 % graphite alkene powder and ethanol or melting state of polyamide material. An INDEPENDENT CLAIM is also included for a thin film graphene atomic oxygen detection structure manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram of a thin film graphene atomic oxygen detecting structure manufacturing method.