▎ 摘 要
NOVELTY - The door has a buffer layer paved on an upper surface of a substrate. An arc-shaped waveguide is paved on an upper surface of the buffer layer. A straight waveguide is composed of a bottom straight waveguide. A middle arc and upper layer arc waveguides are connected to form a bottom arc waveguide material by a Complementary metal-oxide-Semiconductor (CMOS) compatible process, where thickness of bottom arc-shaped waveguide is 1 nm, the thickness of the middle arc-shaped waveguide is 20 nm and the thickness of the upper layer arc-shaped waveguide is 20 nm. USE - Graphene-based surface plasma excimer or/and or door. ADVANTAGE - The door is compact in structure, easy for integration and small in size. DESCRIPTION OF DRAWING(S) - The drawing shows a top perspective view of a graphene-based surface plasma excimer or/and or door.