• 专利标题:   Graphene-based surface plasma excimer or/and or door, has middle arc and upper layer arc waveguides connected to form bottom arc waveguide material by Complementary metal-oxide-Semiconductor compatible process.
  • 专利号:   CN107908056-A
  • 发明人:   CHEN W, ZHOU L, WANG P, DING J, YANG J
  • 专利权人:   UNIV NINGBO
  • 国际专利分类:   G02F003/00, G02B006/122
  • 专利详细信息:   CN107908056-A 13 Apr 2018 G02F-003/00 201831 Pages: 12 Chinese
  • 申请详细信息:   CN107908056-A CN11000485 24 Oct 2017
  • 优先权号:   CN11000485

▎ 摘  要

NOVELTY - The door has a buffer layer paved on an upper surface of a substrate. An arc-shaped waveguide is paved on an upper surface of the buffer layer. A straight waveguide is composed of a bottom straight waveguide. A middle arc and upper layer arc waveguides are connected to form a bottom arc waveguide material by a Complementary metal-oxide-Semiconductor (CMOS) compatible process, where thickness of bottom arc-shaped waveguide is 1 nm, the thickness of the middle arc-shaped waveguide is 20 nm and the thickness of the upper layer arc-shaped waveguide is 20 nm. USE - Graphene-based surface plasma excimer or/and or door. ADVANTAGE - The door is compact in structure, easy for integration and small in size. DESCRIPTION OF DRAWING(S) - The drawing shows a top perspective view of a graphene-based surface plasma excimer or/and or door.