• 专利标题:   Coating metal surface with graphene used in organic LED by depositing first graphene molecular precursor on top of metal surface and transforming deposited first graphene molecular precursor into surface bound graphene interfacial layer.
  • 专利号:   WO2023042210-A1
  • 发明人:   NAVEH D Y
  • 专利权人:   2D GENERATION LTD, UNIV BARILAN
  • 国际专利分类:   C01B032/182, C01B032/184, C23C014/06
  • 专利详细信息:   WO2023042210-A1 23 Mar 2023 C01B-032/182 202336 Pages: 68 English
  • 申请详细信息:   WO2023042210-A1 WOIL051010 20 Sep 2022
  • 优先权号:   US245956P

▎ 摘  要

NOVELTY - Coating a metal surface with graphene, comprises: obtaining a metal having a surface; obtaining a first graphene molecular precursor comprising at least one compound consisting of substituted metal containing compounds (I) or (II); depositing the first graphene molecular precursor on top of the metal surface to obtain a surface at least partially coated with the graphene molecular precursor and bound to the graphene molecular precursor; and transforming the deposited first graphene molecular precursor into a surface bound graphene interfacial layer, to obtain a graphene coated metal surface comprising a graphene interfacial layer bound to the surface of the metal. USE - The method is useful for coating a metal surface with graphene, which is used in a device including interconnection, a device including back end of lines or nano-electro mechanical device, organic LED, transparent conductive electrodes, electro-optical sensor, graphene transistor or high conduction interconnect (all claimed). ADVANTAGE - The method provides better diffusion barrier materials that may exhibit better conductivity; increases its reliability and consistency, to perform quality assurance and detect an authenticity signature of a produced film being part of a device; provides a highly conductive diffusion barrier layer and enables driving higher currents through an interconnection section without passing the maximal current density driven through the metal wire, per the defined reliability; and exhibits improved conductivity and improved reliability requires the conditions i.e. (i) good thermal and chemical stability, (ii) good thermal conductivity, (iii) good adhesion or bonding to the target metal, where target metal would typically be copper, aluminum, nickel alloy, ruthenium or gold, though other metals may be appropriate as well, and (iv) fast, void-free, wafer-scale, high-yield deposition method. DETAILED DESCRIPTION - Coating a metal surface with graphene, comprises: obtaining a metal having a surface; obtaining a first graphene molecular precursor comprising at least one compound consisting of substituted metal containing compounds of formula (G-(X1)i(Y1)m(Y2)n) (I) or (G-(X1)i(X2)j(Y1)m(Y2)n) (II); depositing the first graphene molecular precursor on top of the metal surface to obtain a surface at least partially coated with the graphene molecular precursor and bound to the graphene molecular precursor; and transforming the deposited first graphene molecular precursor into a surface bound graphene interfacial layer, to obtain a graphene coated metal surface comprising a graphene interfacial layer bound to the surface of the metal. G=6-100C hydrocarbon component; X1=tethering group to the surface of the metal material; X2=at least one of a tethering group to a graphene surface X2G, a tethering group to a metal layer X2M and a tethering group to a non-metal layer X2N; Y1, Y2=H, halo, hydroxy or -COOH; and i, j, m, n=1-20. INDEPENDENT CLAIMS are also included for: a graphene coated metal surface comprising a covalent bond between the graphene coating and the metal surface; a device comprising a graphene coated metal surface; and compound having (I), (II), substituted metal containing compounds of formula (G-(X2)j(Y1)m(Y2)n) (IV) or substituted metal containing compounds of formula (G-(X2)i(X3)j(Y1a)m(Y2a)n) (VI) for used as a component in graphene molecular precursor. X3=tethering group to the surface of the graphene coating being different than the tethering group X2; and Y1a, Y2a=H, halo or -COOH.