• 专利标题:   Thin film transistor has laminating structure of oxide layer, where graphene layer is provided between source electrode and drain electrode.
  • 专利号:   KR1503011-B1
  • 发明人:   LEE S S, AN K S, LIM J, MYUNG S, SONG W, JUNG M W
  • 专利权人:   KOREA RES INST CHEM TECHNOLOGY
  • 国际专利分类:   H01L021/336, H01L029/786
  • 专利详细信息:   KR1503011-B1 18 Mar 2015 H01L-029/786 201523 Pages: 8
  • 申请详细信息:   KR1503011-B1 KR118360 04 Oct 2013
  • 优先权号:   KR118360

▎ 摘  要

NOVELTY - The thin film transistor has a gate electrode, in which a gate insulating layer is put in the interval and is provided in opposite directions to a channel layer. The channel layer has a laminating structure of an oxide layer, where a graphene layer is provided between a source electrode and a drain electrode. USE - Thin film transistor. ADVANTAGE - The channel layer has a laminating structure of an oxide layer, where a graphene layer is provided between a source electrode and a drain electrode, and hence ensures increasing the charge mobility without reducing the transparency of the thin film transistor, as well as ensures simple manufacturing of the thin film transistor. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a manufacturing method for a thin film transistor. DESCRIPTION OF DRAWING(S) - The drawing shows a graphical representation of charge mobility of a thin film transistor.