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  • 专利标题:   Depositing graphene layers on heated substrate in vacuum chamber, comprises diffusing volatile hydrocarbons to substrate from graphite surface target magnetron operating in same volume, at a low pressure hydrogen atmosphere.
  • 专利号:   RU2011139480-A
  • 发明人:   KONOV V I, KRASOVSKY V I, MELNIK N N, SAVRANSKY V V, VLASOV D V, YURKOV A N
  • 专利权人:   AS RUSSIA GEN PHYSICS INST
  • 国际专利分类:   B82B003/00, C01B031/00
  • 专利详细信息:   RU2011139480-A 10 Apr 2013 C01B-031/00 201365 Pages: 2 Russian
  • 申请详细信息:   RU2011139480-A RU139480 28 Sep 2011
  • 优先权号:   RU139480

▎ 摘　　要

NOVELTY - Depositing graphene layers on a heated substrate in a vacuum chamber, comprises diffusing volatile hydrocarbons to the substrate from graphite surface target magnetron operating in the same volume, at a low pressure hydrogen atmosphere. USE - The process is useful for depositing graphene layers on a heated substrate in a vacuum chamber (claimed).