• 专利标题:   Wafer for CVD growth of uniform graphene at temperature in excess temperature, comprises planar silicon substrate, insulating layer provided across silicon substrate, and barrier layer provided across insulating layer, where barrier layer is alumina and/or hafnium oxide layer.
  • 专利号:   GB2605167-A
  • 发明人:   JAGT R, KAINTH J, DIXON S
  • 专利权人:   PARAGRAF LTD
  • 国际专利分类:   C23C016/02, C23C016/26, C23C016/455
  • 专利详细信息:   GB2605167-A 28 Sep 2022 C23C-016/455 202282 English
  • 申请详细信息:   GB2605167-A GB004140 24 Mar 2021
  • 优先权号:   GB004140

▎ 摘  要

NOVELTY - A wafer comprises a planar silicon substrate, an insulating layer provided across the silicon substrate, and a barrier layer provided across the insulating layer, where the barrier layer is an alumina and/or hafnium oxide layer, has a constant thickness or less and provides a growth surface for the CVD growth of uniform graphene. USE - Wafer for CVD growth of uniform graphene at temperature in excess of 700°C. ADVANTAGE - The wafer overcomes, or at least substantially reduces, the various problems associated with the prior art or at least provides a commercially useful alternative. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for: 1. laminate, which comprises the wafer and a graphene layer formed on the growth surface of the barrier layer by CVD at a temperature in excess of 700°C; 2. an electronic device, which comprises the laminate; 3. a method for the manufacturing wafer for the CVD growth of uniform graphene at a temperature in excess of 700°C, which involves: a. providing a planar silicon substrate having an insulating layer provided across a surface, b. forming a barrier layer across the insulating layer by ALD using water or ozone as a precursor, where the barrier layer is an alumina and/or hafnium oxide layer, has a constant thickness of 20 nm or less and provides a growth surface for the CVD growth of uniform graphene at a temperature in excess of 700°C; 4. a method for the manufacturing of a laminate, which involves: a. providing the wafer, b. and forming a graphene layer on the growth surface of the barrier layer by CVD at a temperature in excess of 700°C.