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  • 专利标题:   Graphene-based apparatus e.g. integrated circuit has flat monolayer that is adjacent to flat surface of sacrificial substrate and transfer substrate that includes flat surface adjacent to other monolayer.
  • 专利号:   WO2011141885-A1, US2011278545-A1, EP2548228-A1, CN102934230-A, US9024300-B2, CN102934230-B, EP2548228-A4
  • 发明人:   PASANEN P, VOUTILAINEN M K, VOUTILAINEN M
  • 专利权人:   NOKIA CORP, NOKIA CORP, NOKIA CORP, NOKIA CORP, NOKIA CORP
  • 国际专利分类:   B82Y010/00, H01L021/02, H01L021/314, H01L029/16, H01L029/417, H01L051/00, B32B003/10, B32B038/00, B32B038/10, B32B009/04, H01L029/66, H01L021/18, H01L021/683, H01L029/08, H01L029/778, H01L029/786
  • 专利详细信息:   WO2011141885-A1 17 Nov 2011 H01L-029/16 201177 Pages: 27 English
  • 申请详细信息:   WO2011141885-A1 WOIB052087 12 May 2011
  • 优先权号:   US779436

▎ 摘　　要

NOVELTY - The apparatus (70) has sacrificial substrate (10) that includes flat surface and flat upper monolayer (20) that is adjacent to flat surface of sacrificial substrate. A transfer substrate (12) includes flat surface adjacent to lower monolayer (21). USE - Graphene-based apparatus e.g. integrated circuit. ADVANTAGE - The manufacturing technique can be reused and the graphene-based apparatus can be manufactured with high efficiency. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for method of manufacturing graphene-based apparatus. DESCRIPTION OF DRAWING(S) - The drawings show the sectional views illustrating the manufacturing process of graphene-based apparatus. Sacrificial substrate (10) Transfer substrate (12) Upper monolayer (20) Lower monolayer (21) Graphene-based apparatus (70)