• 专利标题:   Stacking structure for use in electronic device, has intermediate layer placed on graphene layer that is formed from linear type precursor, and material layer placed on intermediate layer and formed through atomic layer deposition.
  • 专利号:   US2015194233-A1, KR2015081202-A
  • 发明人:   JEONG S, PARK S, SHIN H, GU Y, KIM H, YANG J, GU Y H, JEONG S J, KIM H S, PARK S J, SHIN H J, YANG J H
  • 专利权人:   UNIV SUNGKYUNKWAN RES BUSINESS FOUND, SAMSUNG ELECTRONICS CO LTD, UNIV SUNGKYUNKWAN RES BUSINESS FOUND
  • 国际专利分类:   C23C016/02, C23C016/06, C23C016/455, H01B001/04, H01B013/06, H01L029/16, B32B038/00, B32B009/00, C01B031/00
  • 专利详细信息:   US2015194233-A1 09 Jul 2015 H01B-001/04 201546 Pages: 10 English
  • 申请详细信息:   US2015194233-A1 US588734 02 Jan 2015
  • 优先权号:   KR000931

▎ 摘  要

NOVELTY - The structure has an intermediate layer (24) placed on a graphene layer that is formed from a linear type precursor. A material layer is placed on the intermediate layer and formed through atomic layer deposition. The intermediate layer includes a thickness in a range of about 0.1 nano meter to about 5 nano meter, where the material layer comprises a high-k material, graphene that constitutes the graphene layer is formed by a small number of carbon atoms that are connected in a covalent bond and forms a polycyclic aromatic molecule. USE - Stacking structure for use in an electronic device. ADVANTAGE - The structure improves surface flatness of the material layer, so that physical uniformity of the material layer is easily ensured. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for forming a material layer on a graphene layer. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of an electronic device including material layer formed on graphene layer. Substrate (20) Source electrode (21a) Drain electrode (21b) Channel layer (22) Intermediate layer (24) Gate insulating layer (26) Gate electrode (28)