• 专利标题:   Manufacture of thin film used for substrate detachment, involves arranging inorganic metal salt thin film layer made of inorganic metal salt on surface of support substrate, and emitting oxide gas to outside when irradiated with light energy.
  • 专利号:   KR2022125690-A
  • 发明人:   SUNG K, KIM T H, KIM M Y, PARK S H
  • 专利权人:   UNIV KOREA RES BUSINESS FOUND
  • 国际专利分类:   H01L051/00, H01L051/56
  • 专利详细信息:   KR2022125690-A 14 Sep 2022 H01L-051/00 202281 Pages: 20
  • 申请详细信息:   KR2022125690-A KR026616 02 Mar 2022
  • 优先权号:   KR029668

▎ 摘  要

NOVELTY - Manufacture of a thin film involves arranging an inorganic metal salt thin film layer made of an inorganic metal salt on one surface of the support substrate. USE - Manufacture of thin film (claimed) used for substrate detachment from carrier substrate during manufacture of flexible display panel. Uses include but are not limited to liquid crystal display, plasma display panel, organic light-emitting device, and organic LED. ADVANTAGE - The method is economical. The thin film has low thermal expansion coefficient and stimulation of light and heat energy, and facilitates desorption due to outgassing inside the inorganic metal salt thin film layer.